表面颗粒指附着分散在感兴表面上的固体和/或液体物质，不包括覆盖整个表面的膜状物质，是表面污染的重要指标。
| 标准号 & 类别 | 标准名称 | 发布 |
|---|---|---|
| BS EN ISO 14644-9:2022 规范/指南 |
Cleanrooms and associated controlled environments. Assessment of surface cleanliness for particle concentration
固液界面 |
2022-07-31 英国标准学会 |
| DANSK DS/ISO 14644-9:2022 |
Cleanrooms and associated controlled environments – Part 9: Assessment of surface cleanliness for particle concentration
固液界面 |
2022-05-30 丹麦标准化协会 |
| DIN EN ISO 14644-9:2008 规范 |
洁净室和相关控制环境. 第9部分:微粒浓度法进行表面洁净度分类 (ISO/DIS 14644-9-2008); 德文版本prEN ISO 14644-9-2008 Cleanrooms and associated controlled environments - Part 9: Classification of surface particle cleanliness (ISO/DIS 14644-9:2008); German version prEN ISO 14644-9:2008
颗粒浓度 |
2008-08-01 德国标准化学会 |
| DIN EN ISO 14644-9:2022 |
洁净室和相关受控环境 第9部分：颗粒浓度的表面洁净度评估（ISO 14644-9:2022） Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
固液界面 |
2022-10-01 德国标准化学会 |
| DIN EN ISO 14644-9:2022-01 |
草案 洁净室和相关受控环境 第9部分：颗粒浓度表面洁净度评估 (ISO/FDIS 14664-9:2021) Draft Document - Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO/FDIS 14664-9:2021); German and English version prEN ISO 14664-9:2021
固液界面 |
2022-01-31 德国标准化学会 |
| DIN EN ISO 14644-9:2022-10 |
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022); German version EN ISO 14644-9:2022
固液界面 |
2022-10 德国标准化学会 |
| LST EN ISO 14644-9:2022 |
洁净室与受控环境 第9部分：基于粒子浓度的表面洁净度评估（ISO 14644-9:2022） Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
固液界面 |
2022-08-16 立陶宛标准局 |
| NF EN ISO 14644-9:2022 |
洁净室和相关受控环境 - 第 9 部分：通过颗粒浓度评估表面清洁度 Clean rooms and related controlled environments - Part 9: Assessment of surface cleanliness by particle concentration
固液界面 |
2022-05-25 法国标准化协会 |
| NF X44-101-9*NF EN ISO 14644-9:2022 |
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration
固液界面 |
2022-05-25 法国标准化协会 |
| SS-EN ISO 14644-9:2022 |
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
固液界面 |
2022 瑞典标准研究所 |
| UNE-EN ISO 14644-9:2022 |
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
固液界面 |
2022-11-30 西班牙标准化协会 |
| UNI EN ISO 14644-9:2022 |
白色房间和相关受控环境 第9部分：通过颗粒浓度评估表面清洁度 Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration
固液界面 |
2022-07-07 意大利统一标准化组织 |
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