美利体育登录入口官网:BS ISO 13083:2015
表面化学分析. 扫描式探针显微术. 电子扫描式探针显微术 (ESPM), 例如用于二维掺杂成像等用途的SSRM和SCM, 中空间分辨率的定义和校准标准
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
- 标准号
- BS ISO 13083:2015
- 发布
- 2015年
- 国际标准分类(ICS)
- 71.040.40 化学分析
- 总页数
- 26页
- 发布单位
- 英国标准学会
- 当前最新
- BS ISO 13083:2015
- 引用标准
- ISO 18115-2 ISO 18516
- 适用范围
- 本国际标准描述了一种测量扫描电容显微镜 (SCM) 或扫描扩散电阻显微镜 (SSRM) 空间（横向）分辨率的方法，这些显微镜广泛用于对半导体器件中的载流子分布和其他电特性进行成像。该方法需要使用锋利边缘的工件。
| 术语 | 描述 |
|---|---|
| 电扫描探针显微镜 electrical scanning probe microscopy | SPM mode in which a conductive tip is used to measure electrical properties such as capacitance, resistance, electrical field, etc. |
| 接触模式 contact mode | mode of scanning the probe tip over the sample surface, adjusting the relative heights of the probe and sample, in which there is always a repulsive force between the probe and the sample |
| 交流电 AC | alternating current |
| 直流电 DC | direct current |
| 扫描探针显微镜 SPM | scanning probe microscopy |
美利体育登录入口官网: BS ISO 13083:2015 中提到的仪器美利体育官网首页网址
| 扫描扩展电阻显微镜 SSRM | Based on atomic force microscopy (AFM), it is used to probe the 2D resistivity and carrier distribution in semiconductor devices. |
| 扫描电容显微镜 SCM | A modification of scanning probe microscopy in which a conductive probe is in contact with the surface of a sample, with an applied AC bias, and scanned across it. |